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Semiconductor Environmental Health & Safety

From our start in 1984, Industrial Hygiene Resources (IHR) has specialized in providing environmental, safety and health consulting services to the semiconductor manufacturing industry. We work with numerous major semiconductor production firms, and are thoroughly acquainted with the clean room processes and potential health risks for workers. We are capable of addressing not only general industrial hygiene, safety and environmental concerns, but also the nanotechnology related, quality control concerns about product (wafers and chips) unique to this vibrant industry.

We routinely advise clients about regulatory and industry standards for controlling worker exposures to chemicals, including;

Ø      Wet etch; acids, including HCl, HF, HNO3, H2SO4 & H3PO4, and developers such as tetramethyl ammonium hydroxide (TMAH)

Ø      Photo; solvent vapors (photoresist carriers), including glycol ethers like 2-ethoxyethyl acetate (EGMEA), 1-methoxy-2-propyl acetate (PGMEA), ethyl lactate, isobutyl isobutyate (IBIB), n-propoxy propanol, 2-pentanone, and ethyl-3-ethoxy propionate (E3EE).  Also, photoresist stripper solvents such as n-methyl-2-pyrrolidinone (M-Pyrol) and PGMEA

Ø      Diffusion and Implant; Silane, and dopants, including solid source arsenic, and hydrides of arsine, phosphine and boron trifluoride gas

Ø      Maintenance operations; worker exposures with maintenance on ion implanter, and plasma etcher and wet benches

We are also proficient in the measurement of physical agents in the clean rooms, including noise and non-ionizing radiation (plasma etchers), and ionizing radiation (x-ray cabinets).

Also, we are experienced in helping our clients with compliance with several specific OSHA & EPA standards, including;

Ø      Hazardous Waste Operations and Emergency Response (HAZWOP-ER) training

Ø      Personal Respiratory Protection (QNFT)

Ø      Personal Protective Equipment (PPE)

Ø      Confined Space Access

Ø      Lock-Out/Tag-Out (of energy sources)

Staff of IHR will review historic worker exposure monitoring records, walk through the facilities and observe current work practices of fab and support employees and contractors.  We will develop exposure monitoring strategies, such as chemical air sampling, or non-ionizing radiation monitoring.  We will work with our clients to develop effective, yet workable exposure control strategies, including training of workers.  We will report our findings in a professional, comprehensive, yet understandable fashion.  We will support our clients to help resolve any regulatory or litigation issues.

Contact Us:

 

Toll Free: (888) 322-8287
or

Industrial Hygiene Resources

206 Murray Street
Boise, Idaho 83714
208-323-8287
Fax: 208-323-0783